3D Hybrid Optical Inspection System YRi-V

Multi-purpose optical inspection systems for all markets that realize super high-speed and high-accuracy 3D inspections. The mounted coaxial lighting and 5μm lenses added to the lineup support high-accuracy inspections in the device sector.

  • Super high-speed 3D inspections
    56.8cm²/sec (under optimum conditions)
  • Super high-accuracy 3D inspections
    8-way projector
  • 4-way oblique imaging inspections
    20Megapixels 4-angle camera
  • Device inspections
    Super high-resolution 5μm/coaxial lighting